Research on the Calculation of Film Thickness Based on UV-visible Spectrum

The measurement and control of thickness are important steps in the deposition of high-quality films. At present, the film thickness obtained by UV-visible spectra is widely used as a non-invasive method. According to the inherent relationship between the interference fluctuation of UV-Vis transmission and the film thickness, a kind of software was designed based on certain algorithm and fitting method, which can read data of UV-Vis spectra then automatically calculate and output film thickness and refractive index. It is found that the procedure result is in good agreement with the measurement of surface profile, showing considerable reliability.