Effect of Synthesis Parameters of Al-ZnO Composite Powders on the Properties of Ceramic Targets

In this study, Al-ZnO composite ceramic powders were synthesized by sol-gel route, and taking Zn(NO₃)₂·6H₂O and Al(NO₃)₃·9H₂O as precursors and citric acid as complexing agent, Al-ZnO ceramic targets were prepared by ordinary sintering method. The results indicate that the targets have the optimal value of relative density and resistivity when the molar ratio of citric acid to metal ions is 2∶ 1, the pH value is about 7.2 and the drying temperature is 90 ℃. The targets prepared by sol-gel route have better composition uniformity and properties than by solid reaction method.