硬质合金高温化学气相沉积TiC涂层工艺研究

Research of TiC Coatings on Cemented Carbide by HT-CVD

摘要: 采用高温化学气相沉积在YG8基体上制备TiC涂层, 研究沉积温度、沉积时间、H₂流量、H₂/CH₄(流量比)以及TiCl₄流量对镀层的抗弯曲强度、膜基结合力及表面显微硬度的影响, 并通过正交试验优化工艺参数。结果表明:当沉积温度为1 000℃, 沉积时间为90 min, H₂流量为400 ml, H₂/CH₄(流量比)为15:1, TiCl₄流量为80 mL时, 镀层具有优良的性能, 抗弯曲强度达到1 100 N, 表面显微硬度达到3 228 HV, 膜基结合力达到90 N。

Abstract: TiC composite coating were prepared on the YG8 substrate with high temperature chemical vapor deposition (HT-CVD) method.Effects of temperature and time, and the flow of H₂, H₂/CH₄ and Ticl₄ on the bending strength, strength and microhardness of film, and on the bonding strength of thin film-matrix were investigated.The depositing parameters were optimized through orthogonal test.The results indicate that fine composite coating can be these:deposited at 1000℃ for 90 min, and with the flow of H₂ is 400ml, the H₂/CH₄ is 15:1, the flow of TiCl₄ is 80ml, its bending strength is 1100N, its microhardness is 3228HV, the bonding strength of thin film-matrix is 90N.